Abstract
We used atomic layer deposition to form ZnO thin-film coatings on Si substrates and then evaluate the effect of pile-up using the nanoscratch technique under a ramped mode. The wear volume decreased with increasing annealing temperature from room temperature to 400 C for a given load. Elastic-to-plastic deformation occurred during sliding scratch processing between the groove and film for loading penetration of 30 nm. The onset of non-elastic behavior and greater contact pressure were evident for loading penetration of 150 nm; thus, full plastic deformation occurred as a result of a substrate effect. We suspect that elastic-plastic failure events were related to edge bulging between the groove and film, with elastic-plastic deformation attributable to adhesion discontinuities and/or cohesion failure of the ZnO films.
Original language | English |
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Pages (from-to) | 334-338 |
Number of pages | 5 |
Journal | Journal of Physics and Chemistry of Solids |
Volume | 75 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2014 Mar |
Keywords
- A. Thin films
- B. Vapor deposition
- C. Mechanical properties
ASJC Scopus subject areas
- General Chemistry
- General Materials Science
- Condensed Matter Physics