TY - GEN
T1 - Monte-Carlo Modeling and Characterization of Switching Dynamics for Antiferroelectric/Ferroelectric HZO considering Mechanisms of Fatigue
AU - Chen, Yu Chen
AU - Hsiang, Kuo Yu
AU - Lee, Min Hung
AU - Su, Pin
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - We have conducted an NLS-based Monte-Carlo modeling and characterization for switching dynamics of fatigued antiferroelectric/ferroelectric (AFE/FE)HZO. We have modeled the domain pinning probability considering fatigue mechanisms mediated by oxygen vacancy and charge injection for each orthorhombic-phase and tetragonal-phase grains. Our model has been verified with experimental data, and can be beneficial for future AFE/FE memory applications.
AB - We have conducted an NLS-based Monte-Carlo modeling and characterization for switching dynamics of fatigued antiferroelectric/ferroelectric (AFE/FE)HZO. We have modeled the domain pinning probability considering fatigue mechanisms mediated by oxygen vacancy and charge injection for each orthorhombic-phase and tetragonal-phase grains. Our model has been verified with experimental data, and can be beneficial for future AFE/FE memory applications.
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U2 - 10.1109/IEDM45625.2022.10019378
DO - 10.1109/IEDM45625.2022.10019378
M3 - Conference contribution
AN - SCOPUS:85147502935
T3 - Technical Digest - International Electron Devices Meeting, IEDM
SP - 1341
EP - 1344
BT - 2022 International Electron Devices Meeting, IEDM 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 International Electron Devices Meeting, IEDM 2022
Y2 - 3 December 2022 through 7 December 2022
ER -