Monolithic integration of GaN-based lightemitting diodes and metal-oxide-semiconductor field-effect transistors

Ya Ju Lee, Zu Po Yang, Pin Guang Chen, Yung An Hsieh, Yung Chi Yao, Ming Han Liao, Min Hung Lee, Mei Tan Wang, Jung Min Hwang

    Research output: Contribution to journalArticlepeer-review

    32 Citations (Scopus)

    Abstract

    In this study, we report a novel monolithically integrated GaNbased light-emitting diode (LED) with metal-oxide-semiconductor fieldeffect transistor (MOSFET). Without additionally introducing complicated epitaxial structures for transistors, the MOSFET is directly fabricated on the exposed n-type GaN layer of the LED after dry etching, and serially connected to the LED through standard semiconductor-manufacturing technologies. Such monolithically integrated LED/MOSFET device is able to circumvent undesirable issues that might be faced by other kinds of integration schemes by growing a transistor on an LED or vice versa. For the performances of resulting device, our monolithically integrated LED/MOSFET device exhibits good characteristics in the modulation of gate voltage and good capability of driving injected current, which are essential for the important applications such as smart lighting, interconnection, and optical communication.

    Original languageEnglish
    Pages (from-to)A1589-A1595
    JournalOptics Express
    Volume22
    Issue number21
    DOIs
    Publication statusPublished - 2014 Oct 20

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics

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