Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

Jim Wei Wu, Kuan Chia Huang, Ming Li Chiang, Mei Yung Chen, Li Chen Fu

Research output: Contribution to journalArticle

28 Citations (Scopus)


In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.

Original languageEnglish
Article number6584767
Pages (from-to)3704-3712
Number of pages9
JournalIEEE Transactions on Industrial Electronics
Issue number7
Publication statusPublished - 2014 Jul



  • Adaptive complementary sliding-mode controller (SMC)
  • Atomic force microscopy (AFM)
  • Cascaded-type control strategy
  • Neural-network (NN) complementary SMC
  • Precision hybrid scanner
  • Scanning probe-type AFM system

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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