Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

Jim Wei Wu, Kuan Chia Huang, Ming Li Chiang, Mei Yung Chen, Li Chen Fu

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.

Original languageEnglish
Article number6584767
Pages (from-to)3704-3712
Number of pages9
JournalIEEE Transactions on Industrial Electronics
Volume61
Issue number7
DOIs
Publication statusPublished - 2014 Jul

Fingerprint

Atomic force microscopy
Scanning
Controllers
Hysteresis
Costs
Experiments

Keywords

  • Adaptive complementary sliding-mode controller (SMC)
  • Atomic force microscopy (AFM)
  • Cascaded-type control strategy
  • Neural-network (NN) complementary SMC
  • Precision hybrid scanner
  • Scanning probe-type AFM system

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy. / Wu, Jim Wei; Huang, Kuan Chia; Chiang, Ming Li; Chen, Mei Yung; Fu, Li Chen.

In: IEEE Transactions on Industrial Electronics, Vol. 61, No. 7, 6584767, 07.2014, p. 3704-3712.

Research output: Contribution to journalArticle

@article{2af9c1fba9e44a7fa88e933e5b0001e2,
title = "Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy",
abstract = "In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.",
keywords = "Adaptive complementary sliding-mode controller (SMC), Atomic force microscopy (AFM), Cascaded-type control strategy, Neural-network (NN) complementary SMC, Precision hybrid scanner, Scanning probe-type AFM system",
author = "Wu, {Jim Wei} and Huang, {Kuan Chia} and Chiang, {Ming Li} and Chen, {Mei Yung} and Fu, {Li Chen}",
year = "2014",
month = "7",
doi = "10.1109/TIE.2013.2279352",
language = "English",
volume = "61",
pages = "3704--3712",
journal = "IEEE Transactions on Industrial Electronics",
issn = "0278-0046",
publisher = "IEEE Industrial Electronics Society",
number = "7",

}

TY - JOUR

T1 - Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

AU - Wu, Jim Wei

AU - Huang, Kuan Chia

AU - Chiang, Ming Li

AU - Chen, Mei Yung

AU - Fu, Li Chen

PY - 2014/7

Y1 - 2014/7

N2 - In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.

AB - In this paper, we have developed a novel large measurement-range atomic force microscopy (AFM) system performing the tapping mode operation. This system consists of a compact/low-cost scanning probe-type sensing system (z-scanner) and a hybrid xy-scanner. To achieve precision measurement through image scan of given samples, a thorough mathematical modeling is established first, and an advanced robust adaptive controller is then proposed, which can deal with unknown parameters, cross-talk effects, external disturbances, and unknown hysteresis phenomena. The salient properties of the resulting closed-loop AFM system includes long traveling range, high precision, and fast response after integrating two kinds of actuations. To demonstrate and qualify the scanning capability of the proposed system, systematic experiments have been conducted.

KW - Adaptive complementary sliding-mode controller (SMC)

KW - Atomic force microscopy (AFM)

KW - Cascaded-type control strategy

KW - Neural-network (NN) complementary SMC

KW - Precision hybrid scanner

KW - Scanning probe-type AFM system

UR - http://www.scopus.com/inward/record.url?scp=84894080645&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84894080645&partnerID=8YFLogxK

U2 - 10.1109/TIE.2013.2279352

DO - 10.1109/TIE.2013.2279352

M3 - Article

AN - SCOPUS:84894080645

VL - 61

SP - 3704

EP - 3712

JO - IEEE Transactions on Industrial Electronics

JF - IEEE Transactions on Industrial Electronics

SN - 0278-0046

IS - 7

M1 - 6584767

ER -