Mn-doped Zn2SiO4 thin film with green fluorescence enhanced by Ag nano island surface plasmon effect

Kun Cheng Peng*, Yi Chung Lin, Shiu Jen Liu, Tai Er Chen, Chun Ying Lee

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


20-100nm thin films of silver were first deposited on quartz glass by magnetron sputtering. These specimens were then annealed at 500 °C for 15 min by rapid thermal annealing (RTA), which might change the silver films into having a morphology of nano islands. Subsequently, a thin film of Mn-doped ZnO was deposited on the above specimens in a sputtering system. These specimens were removed from the sputtering system and annealed again in an atmospheric furnace at 1200 °C for 2 h. By X-ray diffraction (XRD) analysis, the annealed samples were identified as Mndoped Zn2SiO4 crystals. Furthermore, photoluminescence (PL) measurement showed the 530nm (green light) fluorescence. The silver nano islands embedded in the Mn-doped Zn2SiO4 crystals tended to show an increase in PL intensity in the following order and in increase rate composed with their pristine Mn-doped Zn2SiO4 counterpart: 100nm Ag (-0:33%), 50nm Ag (-0:02%), 20nm Ag (87.4%), 40nm Ag (124.3%), and 30nm Ag (168.5%). Accordingly, the plasmon effect may lead to the enhancement of fluorescence, and the size of silver nano islands determines the increase rate.

Original languageEnglish
Article number11NJ03
JournalJapanese Journal of Applied Physics
Issue number11 PART 2
Publication statusPublished - 2013 Nov

ASJC Scopus subject areas

  • General Engineering
  • General Physics and Astronomy


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