Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035 nm wavelength with a pulse duration of 350 fs and a repetition rate of 100 kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5 lJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287 nm, and the pulse overlap is 75%. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FSlaser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.

Original languageEnglish
Pages (from-to)450-456
Number of pages7
JournalMicroelectronic Engineering
Volume110
DOIs
Publication statusPublished - 2013 Jan 1

Fingerprint

Micromachining
micromachining
Ultrashort pulses
Microfluidics
Ablation
Glass
glass
Laser pulses
pulses
lasers
Scanning
Lab-on-a-chip
Lasers
Laser beam effects
Surface morphology
Surface roughness
Irradiation
Infrared radiation
Wavelength
ablation

Keywords

  • Ablation
  • Femtosecond laser
  • Fluence
  • Microfluidic channels
  • Micromachining

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses. / Chang, Tien-Li.

In: Microelectronic Engineering, Vol. 110, 01.01.2013, p. 450-456.

Research output: Contribution to journalArticle

@article{c0963eae78aa483797831ae069d00ea9,
title = "Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses",
abstract = "This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035 nm wavelength with a pulse duration of 350 fs and a repetition rate of 100 kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5 lJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287 nm, and the pulse overlap is 75{\%}. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FSlaser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.",
keywords = "Ablation, Femtosecond laser, Fluence, Microfluidic channels, Micromachining",
author = "Tien-Li Chang",
year = "2013",
month = "1",
day = "1",
doi = "10.1016/j.mee.2013.03.142",
language = "English",
volume = "110",
pages = "450--456",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

TY - JOUR

T1 - Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses

AU - Chang, Tien-Li

PY - 2013/1/1

Y1 - 2013/1/1

N2 - This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035 nm wavelength with a pulse duration of 350 fs and a repetition rate of 100 kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5 lJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287 nm, and the pulse overlap is 75%. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FSlaser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.

AB - This study presents overlapping multiple pulse scanning, an alternative approach for forming the microfluidic channels in glass through the interaction of infrared femtosecond laser (FS-laser) irradiation with microjoule-energy pulses. The study employs a scanning-based laser system at a 1035 nm wavelength with a pulse duration of 350 fs and a repetition rate of 100 kHz. In this work, the FS-laser pulses easily induced the dynamics of the optical breakdown process with the laser energy in glass. In addition, a single pulse generates an ablation crater with the irradiation pulse energy of 5 lJ. The study demonstrates that the beam profile, pulse overlap, accumulated fluence, and the number of pulses have the strongest influence on surface morphology to form microfluidic-channels. Herein the surface roughness can be improved to 287 nm, and the pulse overlap is 75%. Furthermore, the study analyzes the incubation effect on the number of pulses and the accumulated fluence to confirm the validity of the process model for FSlaser ablation in glass. The technique is useful for prototyping the integrated microfluidic chips that have great potential applications for a lab-on-a-chip.

KW - Ablation

KW - Femtosecond laser

KW - Fluence

KW - Microfluidic channels

KW - Micromachining

UR - http://www.scopus.com/inward/record.url?scp=84885186037&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885186037&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2013.03.142

DO - 10.1016/j.mee.2013.03.142

M3 - Article

AN - SCOPUS:84885186037

VL - 110

SP - 450

EP - 456

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -