Micromachining of graphene based micro-capacitor using picosecond laser ablation

Chien Ping Wang, Ching Pong Chou, Tien-Li Chang, Cheng Ying Chou

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The present study investigated the characteristics of multilayer graphene micro-capacitor as a capacitive touch sensor. The interdigitated electrode was fabricated using 532 nm picosecond laser. Varying laser fluences were investigated to analyze the effectiveness of using picosecond (PS) laser ablation in patterning graphene based devices. The ablation threshold fluence for machining multilayer graphene on the glass substrate was 0.84 mJ/cm2 at a constant scanning speed of 250 mm/s with a repetition rate of 300 kHz. The capacitance in the touched and untouched state as a function of electrode width and length were both investigated of the micro-capacitor. The experiments showed that the sensor capacitance was relatively sensitive to the length of the interdigitated electrode. The sensor capacitance increased approximated linearly as electrode width increased from 200 μm to 600 μm under touched and untouched state. As the electrode width continuously increase W ≥ 600 μm, the sensor capacitance increased sharply under different electrode lengths, especially under touched state. Through the experiments, the purpose of the present work was to demonstrate key parameters and sensing response of the interdigitated graphene based micro-capacitor.

Original languageEnglish
Pages (from-to)69-73
Number of pages5
JournalMicroelectronic Engineering
Volume189
DOIs
Publication statusPublished - 2018 Apr 5

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Micromachining
Laser ablation
micromachining
Graphene
laser ablation
capacitors
graphene
Capacitors
Electrodes
electrodes
Capacitance
capacitance
sensors
Sensors
Multilayers
fluence
touch
Lasers
Ablation

Keywords

  • Capacitor
  • Electrode
  • Graphene
  • Picosecond laser ablation
  • Touch sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Micromachining of graphene based micro-capacitor using picosecond laser ablation. / Wang, Chien Ping; Chou, Ching Pong; Chang, Tien-Li; Chou, Cheng Ying.

In: Microelectronic Engineering, Vol. 189, 05.04.2018, p. 69-73.

Research output: Contribution to journalArticle

Wang, Chien Ping ; Chou, Ching Pong ; Chang, Tien-Li ; Chou, Cheng Ying. / Micromachining of graphene based micro-capacitor using picosecond laser ablation. In: Microelectronic Engineering. 2018 ; Vol. 189. pp. 69-73.
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