MEMS based micromirror device for optical add/drop module

J. C. Chiou*, Y. C. Lin, S. D. Wu, S. H. Lin

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Original languageEnglish
Pages (from-to)82-88
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
Externally publishedYes
EventDesign, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, Australia
Duration: 2001 Dec 172001 Dec 19


  • Holographic gratings
  • OADM
  • Optical MEMS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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