MEMS based micromirror device for optical add/drop module

J. C. Chiou; Y. C. Lin; S. D. Wu; S. H. Lin

doi:10.1117/12.448839

MEMS based micromirror device for optical add/drop module

J. C. Chiou^*, Y. C. Lin, S. D. Wu, S. H. Lin

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

Original language	English
Pages (from-to)	82-88
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4593
DOIs	https://doi.org/10.1117/12.448839
Publication status	Published - 2001
Externally published	Yes
Event	Design, Chararacterization, and Packaging for MEMS and Microelectronics II - Adelaide, Australia Duration: 2001 Dec 17 → 2001 Dec 19

Keywords

Holographic gratings
OADM
Optical MEMS

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.448839

Cite this

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title = "MEMS based micromirror device for optical add/drop module",

abstract = "In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.",

keywords = "Holographic gratings, OADM, Optical MEMS",

author = "Chiou, {J. C.} and Lin, {Y. C.} and Wu, {S. D.} and Lin, {S. H.}",

year = "2001",

doi = "10.1117/12.448839",

language = "English",

volume = "4593",

pages = "82--88",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Design, Chararacterization, and Packaging for MEMS and Microelectronics II ; Conference date: 17-12-2001 Through 19-12-2001",

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TY - JOUR

T1 - MEMS based micromirror device for optical add/drop module

AU - Chiou, J. C.

AU - Lin, Y. C.

AU - Wu, S. D.

AU - Lin, S. H.

PY - 2001

Y1 - 2001

N2 - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

AB - In this paper, the configuration of combining holographic gratings and micromirror devices for optical add/drop functions is proposed for constructing OADM. Based on this architecture, a MEMS based vibrating micromirror device that is driven by electrostatic force in executing add/drop functions is designed and fabricated. Preliminary experiments had demonstrated the feasibility of the proposed system.

KW - Holographic gratings

KW - OADM

KW - Optical MEMS

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U2 - 10.1117/12.448839

DO - 10.1117/12.448839

M3 - Conference article

AN - SCOPUS:0035770507

SN - 0277-786X

VL - 4593

SP - 82

EP - 88

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Chararacterization, and Packaging for MEMS and Microelectronics II

Y2 - 17 December 2001 through 19 December 2001

ER -

MEMS based micromirror device for optical add/drop module

Abstract

Keywords

ASJC Scopus subject areas

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