Mechanism and process dependence of negative bias temperature instability (NBTI) for pMOSFETs with ultrathin gate dielectrics

Chuan H. Liu, Ming T. Lee, Chin Yung Lin, Jenkon Chen, Klaus Schruefer, James Brighten, Nivo Rovedo, Terence B. Hook, Mukesh V. Khare, Shih Fen Huang, Clement Wann, Tze Chiang Chen, Tak H. Ning