Low-voltage InGaZnO thin film transistors with small sub-threshold swing

C. H. Cheng; K. I. Chou; H. H. Hsu

doi:10.1166/jnn.2015.9066

Low-voltage InGaZnO thin film transistors with small sub-threshold swing

C. H. Cheng^*, K. I. Chou, H. H. Hsu

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

We demonstrate a low-voltage driven, indium-gallium-zinc oxide thin-film transistor using high-κ LaAlO₃ gate dielectric. A low V_T of 0.42 V, very small sub-threshold swing of 68 mV/dec, field-effect mobility of 4.1 cm²/Vs and low operation voltage of 1.4 V were reached simultaneously in LaAlO₃/IGZO TFT device. This low-power and small SS TFT has the potential for fast switching speed and low power applications.

Original language	English
Pages (from-to)	1486-1489
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	15
Issue number	2
DOIs	https://doi.org/10.1166/jnn.2015.9066
Publication status	Published - 2015 Jan 1

Keywords

InGaZnO
LaAlO
Sub-threshold swing
Thin film transistor

ASJC Scopus subject areas

Bioengineering
General Chemistry
Biomedical Engineering
General Materials Science
Condensed Matter Physics

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10.1166/jnn.2015.9066

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title = "Low-voltage InGaZnO thin film transistors with small sub-threshold swing",

abstract = "We demonstrate a low-voltage driven, indium-gallium-zinc oxide thin-film transistor using high-κ LaAlO3 gate dielectric. A low VT of 0.42 V, very small sub-threshold swing of 68 mV/dec, field-effect mobility of 4.1 cm2/Vs and low operation voltage of 1.4 V were reached simultaneously in LaAlO3/IGZO TFT device. This low-power and small SS TFT has the potential for fast switching speed and low power applications.",

keywords = "InGaZnO, LaAlO, Sub-threshold swing, Thin film transistor",

author = "Cheng, {C. H.} and Chou, {K. I.} and Hsu, {H. H.}",

year = "2015",

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T1 - Low-voltage InGaZnO thin film transistors with small sub-threshold swing

AU - Cheng, C. H.

AU - Chou, K. I.

AU - Hsu, H. H.

PY - 2015/1/1

Y1 - 2015/1/1

N2 - We demonstrate a low-voltage driven, indium-gallium-zinc oxide thin-film transistor using high-κ LaAlO3 gate dielectric. A low VT of 0.42 V, very small sub-threshold swing of 68 mV/dec, field-effect mobility of 4.1 cm2/Vs and low operation voltage of 1.4 V were reached simultaneously in LaAlO3/IGZO TFT device. This low-power and small SS TFT has the potential for fast switching speed and low power applications.

AB - We demonstrate a low-voltage driven, indium-gallium-zinc oxide thin-film transistor using high-κ LaAlO3 gate dielectric. A low VT of 0.42 V, very small sub-threshold swing of 68 mV/dec, field-effect mobility of 4.1 cm2/Vs and low operation voltage of 1.4 V were reached simultaneously in LaAlO3/IGZO TFT device. This low-power and small SS TFT has the potential for fast switching speed and low power applications.

KW - InGaZnO

KW - LaAlO

KW - Sub-threshold swing

KW - Thin film transistor

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EP - 1489

JO - Journal of Nanoscience and Nanotechnology

JF - Journal of Nanoscience and Nanotechnology

IS - 2

ER -

Low-voltage InGaZnO thin film transistors with small sub-threshold swing

Abstract

Keywords

ASJC Scopus subject areas

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