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Low Voltage High Polarization by Optimizing Scavenged WNx Interfacial Capping Layer at the Ru/HfxZr1-xO2 Interface and Evidence of Fatigue Mechanism

  • Abhijit Aich
  • , Asim Senapati
  • , Zhao Feng Lou
  • , Yi Pin Chen
  • , Shih Yin Huang
  • , Siddheswar Maikap*
  • , Min Hung Lee*
  • , Chee Wee Liu
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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