Low power consumption design of micro-machined thermal sensor for portable spirometer

Nan-Fu Chiu, Tzu Chien Hsiao, Chii Wann Lin

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.

Original languageEnglish
Pages (from-to)225-230
Number of pages6
JournalTamkang Journal of Science and Engineering
Volume8
Issue number3
Publication statusPublished - 2005 Sep 1

Fingerprint

Electric power utilization
Flow rate
Pulmonary diseases
Microfabrication
Anemometers
Sensors
Micromachining
Modems
Costs
Testing
Electric potential
Substrates
Hot Temperature
Optimal design

Keywords

  • ATS
  • FVC
  • PEFR
  • Portable Spirometer
  • Thermal Anemometeric Chip

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Low power consumption design of micro-machined thermal sensor for portable spirometer. / Chiu, Nan-Fu; Hsiao, Tzu Chien; Lin, Chii Wann.

In: Tamkang Journal of Science and Engineering, Vol. 8, No. 3, 01.09.2005, p. 225-230.

Research output: Contribution to journalArticle

@article{a9830f7ec5d049bca7e847324a2b9502,
title = "Low power consumption design of micro-machined thermal sensor for portable spirometer",
abstract = "There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3{\%} variation) for diagnosis requirements.",
keywords = "ATS, FVC, PEFR, Portable Spirometer, Thermal Anemometeric Chip",
author = "Nan-Fu Chiu and Hsiao, {Tzu Chien} and Lin, {Chii Wann}",
year = "2005",
month = "9",
day = "1",
language = "English",
volume = "8",
pages = "225--230",
journal = "Tamkang Journal of Science and Engineering",
issn = "1560-6686",
publisher = "Tamkang University",
number = "3",

}

TY - JOUR

T1 - Low power consumption design of micro-machined thermal sensor for portable spirometer

AU - Chiu, Nan-Fu

AU - Hsiao, Tzu Chien

AU - Lin, Chii Wann

PY - 2005/9/1

Y1 - 2005/9/1

N2 - There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.

AB - There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.

KW - ATS

KW - FVC

KW - PEFR

KW - Portable Spirometer

KW - Thermal Anemometeric Chip

UR - http://www.scopus.com/inward/record.url?scp=26444579866&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=26444579866&partnerID=8YFLogxK

M3 - Article

VL - 8

SP - 225

EP - 230

JO - Tamkang Journal of Science and Engineering

JF - Tamkang Journal of Science and Engineering

SN - 1560-6686

IS - 3

ER -