Abstract
There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.
| Original language | English |
|---|---|
| Pages (from-to) | 225-230 |
| Number of pages | 6 |
| Journal | Tamkang Journal of Science and Engineering |
| Volume | 8 |
| Issue number | 3 |
| Publication status | Published - 2005 Sep 1 |
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Keywords
- ATS
- FVC
- PEFR
- Portable Spirometer
- Thermal Anemometeric Chip
ASJC Scopus subject areas
- Engineering(all)
Cite this
Low power consumption design of micro-machined thermal sensor for portable spirometer. / Chiu, Nan-Fu; Hsiao, Tzu Chien; Lin, Chii Wann.
In: Tamkang Journal of Science and Engineering, Vol. 8, No. 3, 01.09.2005, p. 225-230.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Low power consumption design of micro-machined thermal sensor for portable spirometer
AU - Chiu, Nan-Fu
AU - Hsiao, Tzu Chien
AU - Lin, Chii Wann
PY - 2005/9/1
Y1 - 2005/9/1
N2 - There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.
AB - There are great needs for a low cost and low power consumption portable spirometer for the home care of respiratory diseases. Thermal anemometer has the advantage of possible miniaturization by modem microfabrication processes. However, its optimal design remains to be a technical challenge for the trade off between required sensitivity and power consumption. The designed features of such a sensor include low thermal conduction via substrate, wide dynamic range (0∼180 L/Min) to cover high peak flow rate and possible low cost mass production. To meet these requirements, we used both surface and bulk micromachining techniques to fabricate the sensor for optimal performance. Testing of constructed prototype showed that it can be used under low operating voltage of 3 volts. According to the American Thoracic Society (ATS) guidance for the measurement of pulmonary functions, including dynamic volume of forced expiratory vital capacity (FVC) and flow during forced expiration: peak expiratory flow rate (PEFR), it has necessary accuracy (≤ 3% variation) for diagnosis requirements.
KW - ATS
KW - FVC
KW - PEFR
KW - Portable Spirometer
KW - Thermal Anemometeric Chip
UR - http://www.scopus.com/inward/record.url?scp=26444579866&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=26444579866&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:26444579866
VL - 8
SP - 225
EP - 230
JO - Tamkang Journal of Science and Engineering
JF - Tamkang Journal of Science and Engineering
SN - 1560-6686
IS - 3
ER -