Kink effect for 28 nm n-channel field-effect transistors after decoupled plasma nitridation treatment with annealing temperatures
- Shea Jue Wang
- , Mu Chun Wang
- , Win Der Lee*
- , Wen Sheng Chen
- , Heng Sheng Huang
- , Shuang Yuan Chen
- , L. S. Huang Ms
- , Chuan Hsi Liu
*Corresponding author for this work
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