TY - GEN
T1 - Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation
AU - Lin, Chih Jer
AU - Chen, Chih Keng
AU - Chen, Chun Ta
PY - 2013
Y1 - 2013
N2 - The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined. Finally, the efficacy of the approach is demonstrated to achieve high accuracy positioning via the real-time experiments. The experimental result of the piezo-actuated positioning stage is measured by the laser interferometer (HP-5529A). The experimental results show that the iterative learning control can compensate the hysteresis-caused tracking error and the positional accuracy of better than 100 nano-meter is readily achieved.
AB - The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined. Finally, the efficacy of the approach is demonstrated to achieve high accuracy positioning via the real-time experiments. The experimental result of the piezo-actuated positioning stage is measured by the laser interferometer (HP-5529A). The experimental results show that the iterative learning control can compensate the hysteresis-caused tracking error and the positional accuracy of better than 100 nano-meter is readily achieved.
KW - Hysteresis
KW - Iterative learning control
KW - Laser interferometer
KW - Piezo actuator
UR - http://www.scopus.com/inward/record.url?scp=84873934196&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84873934196&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.284-287.2080
DO - 10.4028/www.scientific.net/AMM.284-287.2080
M3 - Conference contribution
AN - SCOPUS:84873934196
SN - 9783037856123
T3 - Applied Mechanics and Materials
SP - 2080
EP - 2084
BT - Innovation for Applied Science and Technology
T2 - 2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
Y2 - 2 November 2012 through 6 November 2012
ER -