Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation

Chih Jer Lin, Chih Keng Chen, Chun Ta Chen

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined. Finally, the efficacy of the approach is demonstrated to achieve high accuracy positioning via the real-time experiments. The experimental result of the piezo-actuated positioning stage is measured by the laser interferometer (HP-5529A). The experimental results show that the iterative learning control can compensate the hysteresis-caused tracking error and the positional accuracy of better than 100 nano-meter is readily achieved.

    Original languageEnglish
    Title of host publicationInnovation for Applied Science and Technology
    Pages2080-2084
    Number of pages5
    DOIs
    Publication statusPublished - 2013 Feb 20
    Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
    Duration: 2012 Nov 22012 Nov 6

    Publication series

    NameApplied Mechanics and Materials
    Volume284-287
    ISSN (Print)1660-9336
    ISSN (Electronic)1662-7482

    Other

    Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
    CountryTaiwan
    CityKaohsiung
    Period12/11/212/11/6

    Keywords

    • Hysteresis
    • Iterative learning control
    • Laser interferometer
    • Piezo actuator

    ASJC Scopus subject areas

    • Engineering(all)

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