Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation

Chih Jer Lin, Chih Keng Chen, Chun Ta Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined. Finally, the efficacy of the approach is demonstrated to achieve high accuracy positioning via the real-time experiments. The experimental result of the piezo-actuated positioning stage is measured by the laser interferometer (HP-5529A). The experimental results show that the iterative learning control can compensate the hysteresis-caused tracking error and the positional accuracy of better than 100 nano-meter is readily achieved.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages2080-2084
Number of pages5
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12/11/212/11/6

Keywords

  • Hysteresis
  • Iterative learning control
  • Laser interferometer
  • Piezo actuator

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Lin, C. J., Chen, C. K., & Chen, C. T. (2013). Iterative learning control of a piezo-actuated positioning stage for micro/nano manipulation. In Innovation for Applied Science and Technology (pp. 2080-2084). (Applied Mechanics and Materials; Vol. 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.2080