Investigate the characteristics of 0.65(K0.5Bi0.5TiO3)-0.35BaTiO3 films at various deposition temperatures

W. C. Tzou, C. G. Kuo, P. S. Cheng, Y. H. Lin, C. F. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution


0.65(K0.5Bi0.5)TiO3-0.35BaTiO3 (KBT-BT3) ceramics were synthesized using a two-step calcination process that combined hydrothermal and conventional calcination processes. After sintered into ceramic target, KBT-BT3 films were deposited on Pt/Ti/Si and SiO2/Si/Al substrates by radio frequency magnetron (RF) sputtering at various temperatures. The surface morphologies and thicknesses of KBT-BT3 films were characterized by field emission scanning electron microscopy, and the thickness increased with increasing deposition temperature. XRD patterns showed that all KBT-BT3 films were amorphous and higher deposition temperature had no apparent effects to improve the crystalline orientation. The effects of deposition temperatures on the properties of the current-electric filed, polarization-applied electric field, and capacitance- voltage curves were also investigated. As deposition temperatures of KBT-BT3 films increased from room temperature to 400°C, the leakage current density had no apparent variation but the threshold voltage was shifted to lower value. The theorems for the effects of deposition temperature on the properties of KBT-BT3 films were also investigated.

Original languageEnglish
Title of host publicationMetallurgy Technology and Materials II
Number of pages5
Publication statusPublished - 2013
Event2nd International Conference on Metallurgy Technology and Materials, ICMTM 2013 - Hong Kong, China
Duration: 2013 Jun 252013 Jun 26

Publication series

NameAdvanced Materials Research
ISSN (Print)1022-6680


Other2nd International Conference on Metallurgy Technology and Materials, ICMTM 2013
CityHong Kong


  • 0.65(KBiTiO)-0.35BaTiO
  • C-V curve
  • I-V curve
  • P-E curve

ASJC Scopus subject areas

  • Engineering(all)


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