TY - JOUR
T1 - Integration of capacitive and piezoelectric accelerometers using a digital approach
AU - Lu, Yu Sheng
AU - Lee, Po Chen
N1 - Funding Information:
This work was supported in part by the Ministry of Science and Technology under Grants No. MOST 107-2221-E-003-021.
Publisher Copyright:
© 2019 Int. J. Elec. & Elecn. Eng. & Telcomm.
PY - 2019/11/1
Y1 - 2019/11/1
N2 - This study is to obtain an acceleration signal with a nice quality and apply it to a linear motion stage. The accelerometers used in this paper are piezoelectric and capacitive accelerometers. Since a piezoelectric accelerometer cannot measure low-frequency acceleration, its application to servo systems is limited. On the contrary, a capacitive accelerometer is able to measure low-frequency acceleration. However, its output noise is significant, and its dynamic bandwidth is small compared with the piezoelectric accelerometer. This paper proposes a high-performance accelerometer, which digitally integrates the salient features of both capacitive and piezoelectric accelerometers. The proposed accelerometer can measure both low- and high- frequency acceleration. It is also applied to compensating for load disturbance in a linear drive for performance improvement.
AB - This study is to obtain an acceleration signal with a nice quality and apply it to a linear motion stage. The accelerometers used in this paper are piezoelectric and capacitive accelerometers. Since a piezoelectric accelerometer cannot measure low-frequency acceleration, its application to servo systems is limited. On the contrary, a capacitive accelerometer is able to measure low-frequency acceleration. However, its output noise is significant, and its dynamic bandwidth is small compared with the piezoelectric accelerometer. This paper proposes a high-performance accelerometer, which digitally integrates the salient features of both capacitive and piezoelectric accelerometers. The proposed accelerometer can measure both low- and high- frequency acceleration. It is also applied to compensating for load disturbance in a linear drive for performance improvement.
KW - Capacitive accelerometer
KW - Digital integration
KW - Motion control
KW - Piezoelectric accelerometer
UR - http://www.scopus.com/inward/record.url?scp=85081409810&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85081409810&partnerID=8YFLogxK
U2 - 10.18178/ijeetc.8.6.346-351
DO - 10.18178/ijeetc.8.6.346-351
M3 - Article
AN - SCOPUS:85081409810
SN - 2319-2518
VL - 8
SP - 346
EP - 351
JO - International Journal of Electrical and Electronic Engineering and Telecommunications
JF - International Journal of Electrical and Electronic Engineering and Telecommunications
IS - 6
ER -