Integration of capacitive and piezoelectric accelerometers using a digital approach

Yu Sheng Lu*, Po Chen Lee

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This study is to obtain an acceleration signal with a nice quality and apply it to a linear motion stage. The accelerometers used in this paper are piezoelectric and capacitive accelerometers. Since a piezoelectric accelerometer cannot measure low-frequency acceleration, its application to servo systems is limited. On the contrary, a capacitive accelerometer is able to measure low-frequency acceleration. However, its output noise is significant, and its dynamic bandwidth is small compared with the piezoelectric accelerometer. This paper proposes a high-performance accelerometer, which digitally integrates the salient features of both capacitive and piezoelectric accelerometers. The proposed accelerometer can measure both low- and high- frequency acceleration. It is also applied to compensating for load disturbance in a linear drive for performance improvement.

Original languageEnglish
Pages (from-to)346-351
Number of pages6
JournalInternational Journal of Electrical and Electronic Engineering and Telecommunications
Issue number6
Publication statusPublished - 2019 Nov 1


  • Capacitive accelerometer
  • Digital integration
  • Motion control
  • Piezoelectric accelerometer

ASJC Scopus subject areas

  • Instrumentation
  • Computer Networks and Communications
  • Electrical and Electronic Engineering


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