Influence of low temperature oxidation and nitrogen passivation on the MOS interface of C-face 4H-SiC

Kung Yen Lee*, Yu Hao Chang, Yan Hao Huang, Shuen De Wu, Cheng Yueh Chung, Chih Fang Huang, Tai Chou Lee

*Corresponding author for this work

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3 Citations (Scopus)

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