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Influence of low temperature oxidation and nitrogen passivation on the MOS interface of C-face 4H-SiC
Kung Yen Lee*, Yu Hao Chang, Yan Hao Huang, Shuen De Wu, Cheng Yueh Chung, Chih Fang Huang, Tai Chou Lee
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
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(Scopus)