In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

C. L. Cheng; C. T. Chia; C. C. Chiu; C. C. Wu; H. F. Cheng; I. N. Lin

doi:10.1016/S0169-4332(01)00170-2

In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

C. L. Cheng^*, C. T. Chia, C. C. Chiu, C. C. Wu, H. F. Cheng, I. N. Lin

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm ^-1 ) and G-band (∼1582 cm ^-1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp ³ -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

Original language	English
Pages (from-to)	251-256
Number of pages	6
Journal	Applied Surface Science
Volume	174
Issue number	3-4
DOIs	https://doi.org/10.1016/S0169-4332(01)00170-2
Publication status	Published - 2001 Apr 30

Keywords

Diamond-like carbon
Hydrogen etching
PLD
Raman spectroscopy

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
General Physics and Astronomy
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(01)00170-2

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@article{52218932f3324627a2d91baaaf86bbbd,

title = "In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition",

abstract = " Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.",

keywords = "Diamond-like carbon, Hydrogen etching, PLD, Raman spectroscopy",

author = "Cheng, {C. L.} and Chia, {C. T.} and Chiu, {C. C.} and Wu, {C. C.} and Cheng, {H. F.} and Lin, {I. N.}",

note = "Funding Information: The authors would like to thanks the National Science Council of Taiwan, Republic of China for financially supporting this research under Contracts No. NSC-89-2112-M-259-006.",

year = "2001",

month = apr,

day = "30",

doi = "10.1016/S0169-4332(01)00170-2",

language = "English",

volume = "174",

pages = "251--256",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

AU - Cheng, C. L.

AU - Chia, C. T.

AU - Chiu, C. C.

AU - Wu, C. C.

AU - Cheng, H. F.

AU - Lin, I. N.

N1 - Funding Information: The authors would like to thanks the National Science Council of Taiwan, Republic of China for financially supporting this research under Contracts No. NSC-89-2112-M-259-006.

PY - 2001/4/30

Y1 - 2001/4/30

N2 - Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

AB - Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

KW - Diamond-like carbon

KW - Hydrogen etching

KW - PLD

KW - Raman spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=0035971540&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035971540&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(01)00170-2

DO - 10.1016/S0169-4332(01)00170-2

M3 - Article

AN - SCOPUS:0035971540

SN - 0169-4332

VL - 174

SP - 251

EP - 256

JO - Applied Surface Science

JF - Applied Surface Science

IS - 3-4

ER -

In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

Abstract

Keywords

ASJC Scopus subject areas

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