In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

C. L. Cheng, C. T. Chia, C. C. Chiu, C. C. Wu, H. F. Cheng, I. N. Lin

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

Original languageEnglish
Pages (from-to)251-256
Number of pages6
JournalApplied Surface Science
Volume174
Issue number3-4
DOIs
Publication statusPublished - 2001 Apr 30

Fingerprint

Diamond like carbon films
Pulsed laser deposition
Graphitization
Hydrogen
Etching
Pulsed lasers
Raman spectroscopy
Carbon
Annealing
Temperature

Keywords

  • Diamond-like carbon
  • Hydrogen etching
  • PLD
  • Raman spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition. / Cheng, C. L.; Chia, C. T.; Chiu, C. C.; Wu, C. C.; Cheng, H. F.; Lin, I. N.

In: Applied Surface Science, Vol. 174, No. 3-4, 30.04.2001, p. 251-256.

Research output: Contribution to journalArticle

Cheng, C. L. ; Chia, C. T. ; Chiu, C. C. ; Wu, C. C. ; Cheng, H. F. ; Lin, I. N. / In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition. In: Applied Surface Science. 2001 ; Vol. 174, No. 3-4. pp. 251-256.
@article{1eda918f65a34c65874c81fd9e0f547d,
title = "In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition",
abstract = "Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.",
keywords = "Diamond-like carbon, Hydrogen etching, PLD, Raman spectroscopy",
author = "Cheng, {C. L.} and Chia, {C. T.} and Chiu, {C. C.} and Wu, {C. C.} and Cheng, {H. F.} and Lin, {I. N.}",
year = "2001",
month = "4",
day = "30",
doi = "10.1016/S0169-4332(01)00170-2",
language = "English",
volume = "174",
pages = "251--256",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "3-4",

}

TY - JOUR

T1 - In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

AU - Cheng, C. L.

AU - Chia, C. T.

AU - Chiu, C. C.

AU - Wu, C. C.

AU - Cheng, H. F.

AU - Lin, I. N.

PY - 2001/4/30

Y1 - 2001/4/30

N2 - Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

AB - Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

KW - Diamond-like carbon

KW - Hydrogen etching

KW - PLD

KW - Raman spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=0035971540&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035971540&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(01)00170-2

DO - 10.1016/S0169-4332(01)00170-2

M3 - Article

AN - SCOPUS:0035971540

VL - 174

SP - 251

EP - 256

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 3-4

ER -