In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

C. L. Cheng, C. T. Chia, C. C. Chiu, C. C. Wu, H. F. Cheng, I. N. Lin

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Atomic hydrogen etching on the pulsed laser deposited (PLD) diamond-like carbon (DLC) films were examined in situ by using Raman spectroscopy. Thermal annealing of the as-prepared DLC films was found to alter the D-band (∼1355 cm -1 ) and G-band (∼1582 cm -1 ) from unresolved features at room temperature to clearly separated bands at above 500°C, indicating graphitization of the films. The presence of atomic hydrogen retards graphitization at temperatures lower than 500°C, presumably because reactive atomic hydrogen formed sp 3 -bonding carbons which prevented graphitization at below 500°C, while at above 500°C, the hydrogen etches away disordered structure of the DLC film as the intensity changes of the D-bands demonstrate.

Original languageEnglish
Pages (from-to)251-256
Number of pages6
JournalApplied Surface Science
Issue number3-4
Publication statusPublished - 2001 Apr 30



  • Diamond-like carbon
  • Hydrogen etching
  • PLD
  • Raman spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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