Improved thermal stability and stress immunity in highly scalable junctionless FETs using enhanced-depletion channels

  • Chien Liu
  • , Chun Hu Cheng
  • , Ming Huei Lin
  • , Yi Jia Shih
  • , Yu Wen Hung
  • , Chia Chi Fan
  • , Hsuan Han Chen
  • , Wan Hsin Chen
  • , Chih Chieh Hsu
  • , Bing Yang Shih
  • , Yu Chien Chiu
  • , Wu Ching Chou
  • , Hsiao Hsuan Hsu
  • , Chun Yen Chang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In this work, we report a novel multi-PNPN-channel junctionless transistor with short channel length of 60nm. The multi-PNPN junctionless transistor exhibits the larger drive current of >1μA/μm, the steeper turn-on switching of 77 mV/decade, and the higher on/off current ratio of >107 than the hybrid PN channel device under the same gate overdrive. The improved performance is mainly attributed to the enhanced depletion effect of multi-PNPN channel to optimize the electric field modification of surface p-channel. The stronger immunity to constant-voltage stress is also obtained for multi-PNPN channel due to the lower lateral electric field near drain side to reduce the impact ionization ratio.

Original languageEnglish
Pages (from-to)Q242-Q245
JournalECS Journal of Solid State Science and Technology
Volume7
Issue number12
DOIs
Publication statusPublished - 2018 Jan

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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