Improved current distribution in resistive memory on flexible substrate using nitrogen-rich TaN electrode

Zhi Wei Zheng; Chun Hu Cheng; Kun I. Chou; Ming Liu; Albert Chin

doi:10.1063/1.4772003

Improved current distribution in resistive memory on flexible substrate using nitrogen-rich TaN electrode

Zhi Wei Zheng, Chun Hu Cheng, Kun I. Chou, Ming Liu, Albert Chin

Department of Mechatronic Engineering

Research output: Contribution to journal › Article

14 Citations (Scopus)

Abstract

Narrow current distribution, good endurance, and low 28μW switching power are successfully achieved in Ni/GeO_x/TiO_y/TaN resistive random access memory devices. The good distribution and endurance are attributed to the nitrogen-rich TaN to increase the oxidation resistance and decrease the TaON and oxygen vacancies formation from x-ray photoelectron spectroscopy measurements, where such oxygen vacancies are related to current conduction at high resistance state. In addition, the devices on the flexible polyimide substrate exhibit excellent mechanical endurance upon repeated bending tests, showing their high potential for low-cost flexible memory application.

Original language	English
Article number	243507
Journal	Applied Physics Letters
Volume	101
Issue number	24
DOIs	https://doi.org/10.1063/1.4772003
Publication status	Published - 2012 Dec 10

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ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Cite this

Zheng, Z. W., Cheng, C. H., Chou, K. I., Liu, M., & Chin, A. (2012). Improved current distribution in resistive memory on flexible substrate using nitrogen-rich TaN electrode. Applied Physics Letters, 101(24), [243507]. https://doi.org/10.1063/1.4772003

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N2 - Narrow current distribution, good endurance, and low 28μW switching power are successfully achieved in Ni/GeOx/TiOy/TaN resistive random access memory devices. The good distribution and endurance are attributed to the nitrogen-rich TaN to increase the oxidation resistance and decrease the TaON and oxygen vacancies formation from x-ray photoelectron spectroscopy measurements, where such oxygen vacancies are related to current conduction at high resistance state. In addition, the devices on the flexible polyimide substrate exhibit excellent mechanical endurance upon repeated bending tests, showing their high potential for low-cost flexible memory application.

AB - Narrow current distribution, good endurance, and low 28μW switching power are successfully achieved in Ni/GeOx/TiOy/TaN resistive random access memory devices. The good distribution and endurance are attributed to the nitrogen-rich TaN to increase the oxidation resistance and decrease the TaON and oxygen vacancies formation from x-ray photoelectron spectroscopy measurements, where such oxygen vacancies are related to current conduction at high resistance state. In addition, the devices on the flexible polyimide substrate exhibit excellent mechanical endurance upon repeated bending tests, showing their high potential for low-cost flexible memory application.

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Access to Document

10.1063/1.4772003