Implementation process of a reflective-type electrical tunable SOI optical filter

Shyh Lin Tsao; Shu Fen Hu; Jiang Hung Tien; Chun Wei Tsai

doi:10.1109/CLEOPR.2003.1274739

Implementation process of a reflective-type electrical tunable SOI optical filter

Shyh Lin Tsao, Shu Fen Hu, Jiang Hung Tien, Chun Wei Tsai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	282
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1274739
Publication status	Published - 2003
Externally published	Yes
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	1

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	2003/12/15 → 2003/12/19

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2003.1274739

Cite this

Tsao, S. L., Hu, S. F., Tien, J. H., & Tsai, C. W. (2003). Implementation process of a reflective-type electrical tunable SOI optical filter. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (pp. 282). Article 1274739 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274739

Implementation process of a reflective-type electrical tunable SOI optical filter. / Tsao, Shyh Lin; Hu, Shu Fen; Tien, Jiang Hung et al.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 282 1274739 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsao, SL, Hu, SF, Tien, JH & Tsai, CW 2003, Implementation process of a reflective-type electrical tunable SOI optical filter. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274739, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 282, 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 2003/12/15. https://doi.org/10.1109/CLEOPR.2003.1274739

Tsao SL, Hu SF, Tien JH, Tsai CW. Implementation process of a reflective-type electrical tunable SOI optical filter. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 282. 1274739. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1274739

Tsao, Shyh Lin ; Hu, Shu Fen ; Tien, Jiang Hung et al. / Implementation process of a reflective-type electrical tunable SOI optical filter. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 282 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

@inproceedings{51c3ff26fad94bb6937a41c88780cc82,

title = "Implementation process of a reflective-type electrical tunable SOI optical filter",

abstract = "In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.",

author = "Tsao, {Shyh Lin} and Hu, {Shu Fen} and Tien, {Jiang Hung} and Tsai, {Chun Wei}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",

year = "2003",

doi = "10.1109/CLEOPR.2003.1274739",

language = "English",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "282",

booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",

}

TY - GEN

T1 - Implementation process of a reflective-type electrical tunable SOI optical filter

AU - Tsao, Shyh Lin

AU - Hu, Shu Fen

AU - Tien, Jiang Hung

AU - Tsai, Chun Wei

PY - 2003

Y1 - 2003

N2 - In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.

AB - In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.

UR - http://www.scopus.com/inward/record.url?scp=84955062005&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84955062005&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2003.1274739

DO - 10.1109/CLEOPR.2003.1274739

M3 - Conference contribution

AN - SCOPUS:84955062005

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

SP - 282

BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003

Y2 - 15 December 2003 through 19 December 2003

ER -

Implementation process of a reflective-type electrical tunable SOI optical filter

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