Abstract
In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.
| Original language | English |
|---|---|
| Title of host publication | CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics |
| Subtitle of host publication | Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Number of pages | 1 |
| ISBN (Electronic) | 0780377664 |
| DOIs | |
| Publication status | Published - 2003 Jan 1 |
| Event | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19 |
Publication series
| Name | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
|---|---|
| Volume | 1 |
Other
| Other | 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 |
|---|---|
| Country | Taiwan |
| City | Taipei |
| Period | 03/12/15 → 03/12/19 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Cite this
Tsao, S. L., Hu, S-F., Tien, J. H., & Tsai, C. W. (2003). Implementation process of a reflective-type electrical tunable SOI optical filter. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274739] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274739