Implementation process of a reflective-type electrical tunable SOI optical filter

Shyh Lin Tsao; Shu-Fen Hu; Jiang Hung Tien; Chun Wei Tsai

doi:10.1109/CLEOPR.2003.1274739

Implementation process of a reflective-type electrical tunable SOI optical filter

Shyh Lin Tsao, Shu-Fen Hu, Jiang Hung Tien, Chun Wei Tsai

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1274739
Publication status	Published - 2003 Jan 1
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 2003 Dec 15 → 2003 Dec 19

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	1

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	2003/12/15 → 2003/12/19

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2003.1274739

Cite this

Tsao, S. L., Hu, S-F., Tien, J. H., & Tsai, C. W. (2003). Implementation process of a reflective-type electrical tunable SOI optical filter. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1274739] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1274739

Implementation process of a reflective-type electrical tunable SOI optical filter. / Tsao, Shyh Lin; Hu, Shu-Fen; Tien, Jiang Hung; Tsai, Chun Wei.

CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1274739 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsao, SL, Hu, S-F, Tien, JH & Tsai, CW 2003, Implementation process of a reflective-type electrical tunable SOI optical filter. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1274739, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 1, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 2003/12/15. https://doi.org/10.1109/CLEOPR.2003.1274739

Tsao SL, Hu S-F, Tien JH, Tsai CW. Implementation process of a reflective-type electrical tunable SOI optical filter. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1274739. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2003.1274739

Tsao, Shyh Lin ; Hu, Shu-Fen ; Tien, Jiang Hung ; Tsai, Chun Wei. / Implementation process of a reflective-type electrical tunable SOI optical filter. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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Implementation process of a reflective-type electrical tunable SOI optical filter

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