@inproceedings{e35ae1e3f32040078bcfa7d9881041a8,
title = "Implementation process of a reflective-type electrical tunable SOI optical filter",
abstract = "In this paper, we implement a wavelength tunable filter based on polysilicon covered SOI wafer. The SOI filter is achieved by e-beam writing a reflective wavelength tunable grating on MMI SOI waveguide.",
author = "Tsao, {Shyh Lin} and Shu-Fen Hu and Tien, {Jiang Hung} and Tsai, {Chun Wei}",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/CLEOPR.2003.1274739",
language = "English",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",
note = "5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",
}