Impact of Zirconium Doping on Steep Subthreshold Switching of Negative Capacitance Hafnium Oxide Based Transistors
- Chun Hu Cheng*
- , Ming Huei Lin
- , Hsin Yu Chen
- , Chia Chi Fan
- , Chien Liu
- , Hsiao Hsuan Hsu
- , Chun Yen Chang
*Corresponding author for this work
Research output: Contribution to journal › Letter › peer-review
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