Identical Pulse Programming Based Ultra-Thin 5 nm HfZrO2Ferroelectric Field Effect Transistors with High Conductance Ratio and Linearity Potentiation Learning Trajectory

  • C. Y. Liao
  • , K. Y. Hsiang
  • , S. H. Chang
  • , S. H. Chiang
  • , F. C. Hsieh
  • , J. H. Liu
  • , H. Liang
  • , Z. F. Luo
  • , C. Y. Lin
  • , L. Y. Chen
  • , V. P.H. Hu
  • , M. H. Lee*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

This study systematically investigates identical pulse stimulation for potentiation machine learning to achieve a linear potentiation non-linearity (α P) equal to 1.25 and a high conductance ratio >1,000x with 5 nm-thick HfZrO2 (HZO) ferroelectric field effect transistors (FeFET). The trade-off characteristics between conductance ratio and linearity are exhibited. The higher remnant polarization (Pr) for memory window (MW) enhancement leads to an increasing conductance ratio but degrades the non-linearity of the training curve. The optimized stimulation condition for the identical pulse is performed with a pulse width of 50 ns and low access voltage for HZO thicknesses from 15 to 5 nm. These highlighted merits provide an opportunity to integrate emerging devices such as computing-in-memory (CIM) applications in the future.

Original languageEnglish
Article number065015
JournalECS Journal of Solid State Science and Technology
Volume10
Issue number6
DOIs
Publication statusPublished - 2021

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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