Abstract
This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.
| Original language | English |
|---|---|
| Pages (from-to) | 970-975 |
| Number of pages | 6 |
| Journal | Diamond and Related Materials |
| Volume | 10 |
| Issue number | 3-7 |
| DOIs | |
| Publication status | Published - 2001 Mar 1 |
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Keywords
- Diamond-like carbon
- Etching
- Raman spectroscopy
- Thermal annealing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Chemistry(all)
- Mechanical Engineering
- Materials Chemistry
- Electrical and Electronic Engineering
Cite this
Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition. / Cheng, C. L.; Chia, C. T.; Chiu, C. C.; Wu, C. C.; Lin, I. N.
In: Diamond and Related Materials, Vol. 10, No. 3-7, 01.03.2001, p. 970-975.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition
AU - Cheng, C. L.
AU - Chia, C. T.
AU - Chiu, C. C.
AU - Wu, C. C.
AU - Lin, I. N.
PY - 2001/3/1
Y1 - 2001/3/1
N2 - This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.
AB - This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.
KW - Diamond-like carbon
KW - Etching
KW - Raman spectroscopy
KW - Thermal annealing
UR - http://www.scopus.com/inward/record.url?scp=0035270408&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035270408&partnerID=8YFLogxK
U2 - 10.1016/S0925-9635(00)00508-2
DO - 10.1016/S0925-9635(00)00508-2
M3 - Article
AN - SCOPUS:0035270408
VL - 10
SP - 970
EP - 975
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 3-7
ER -