Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition

C. L. Cheng, C. T. Chia, C. C. Chiu, C. C. Wu, I. N. Lin

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.

Original languageEnglish
Pages (from-to)970-975
Number of pages6
JournalDiamond and Related Materials
Volume10
Issue number3-7
DOIs
Publication statusPublished - 2001 Mar 1

Fingerprint

Diamond
Pulsed laser deposition
pulsed laser deposition
Hydrogen
Diamonds
Carbon
diamonds
Diamond like carbon films
Annealing
annealing
carbon
hydrogen
Raman scattering
Raman spectra
atomic structure
Temperature
Raman spectroscopy
Etching
etching
temperature

Keywords

  • Diamond-like carbon
  • Etching
  • Raman spectroscopy
  • Thermal annealing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition. / Cheng, C. L.; Chia, C. T.; Chiu, C. C.; Wu, C. C.; Lin, I. N.

In: Diamond and Related Materials, Vol. 10, No. 3-7, 01.03.2001, p. 970-975.

Research output: Contribution to journalArticle

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