Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition

C. L. Cheng, C. T. Chia, C. C. Chiu, C. C. Wu, I. N. Lin

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22 Citations (Scopus)


This work utilizes Raman spectroscopy to examine the thermal annealing of diamond-like carbon (DLC) films produced by pulsed laser deposition (PLD). Post-production modification of DLC films by atomic hydrogen etching reveals distinct results and is observed for the first time. Both ex-situ and in-situ thermal annealing and annealing with atomic hydrogen on the as-prepared DLC samples are compared herein. The Raman spectra reveal that the typical D- and G-bands evolve from unresolved to well separated above 400°C as the temperature increases from room temperature to 700°C. Atomic hydrogen enhances the annealing process at temperatures above 500°C. Thermal annealing transforms the DLC films into graphitic structures while atomic hydrogen etches away the disordered carbons according to both the ex-situ and in-situ Raman spectra.

Original languageEnglish
Pages (from-to)970-975
Number of pages6
JournalDiamond and Related Materials
Issue number3-7
Publication statusPublished - 2001 Mar 1



  • Diamond-like carbon
  • Etching
  • Raman spectroscopy
  • Thermal annealing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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