Abstract
An AND-type split-gate Flash memory cell with a trench select gate and a buried n+ source is proposed. This cell, programmed by ballistic source side injection (BSSI), can provide high programming efficiency with a cell size of 5 F2. Furthermore, both the programming speed and the read current are enhanced by the shared select gate configuration.
| Original language | English |
|---|---|
| Pages (from-to) | 109-111 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 53 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2006 Jan |
| Externally published | Yes |
Keywords
- AND-type array
- Ballistic
- Flash memory
- Split-gate flash
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering