Abstract
An AND-type split-gate Flash memory cell with a trench select gate and a buried n+ source is proposed. This cell, programmed by ballistic source side injection (BSSI), can provide high programming efficiency with a cell size of 5 F2. Furthermore, both the programming speed and the read current are enhanced by the shared select gate configuration.
Original language | English |
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Pages (from-to) | 109-111 |
Number of pages | 3 |
Journal | IEEE Transactions on Electron Devices |
Volume | 53 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2006 Jan |
Externally published | Yes |
Keywords
- AND-type array
- Ballistic
- Flash memory
- Split-gate flash
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering