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Highly Reliable and High-Yield 1.2V HfZrOx FRAM and its Physical Origin via Micrometer-Scale Nanocrystalline Domain Analysis

  • Yu De Lin*
  • , Chen Yi Cho
  • , Jian Wei Su
  • , Yi Hui Wei
  • , Li Ying Hung
  • , Po Han Chang
  • , Ching Chih Hsu
  • , Po Chun Yeh
  • , Min Hung Lee
  • , Tuo Hung Hou
  • , Shyh Shyuan Sheu
  • , Wei Chung Lo
  • , Shih Chieh Chang
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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