@article{660650c3dc73487f9db831ddba55c2af,
title = "Highly Plasmonic Titanium Nitride by Room-Temperature Sputtering",
abstract = "Titanium nitride (TiN) has recently emerged as an attractive alternative material for plasmonics. However, the typical high-temperature deposition of plasmonic TiN using either sputtering or atomic layer deposition has greatly limited its potential applications and prevented its integration into existing CMOS device architectures. Here, we demonstrate highly plasmonic TiN thin films and nanostructures by a room-temperature, low-power, and bias-free reactive sputtering process. We investigate the optical properties of the TiN films and their dependence on the sputtering conditions and substrate materials. We find that our TiN possesses one of the largest negative values of the real part of the dielectric function as compared to all other plasmonic TiN films reported to date. Two-dimensional periodic arrays of TiN nanodisks are then fabricated, from which we validate that strong plasmonic resonances are supported. Our room-temperature deposition process can allow for fabricating complex plasmonic TiN nanostructures and be integrated into the fabrication of existing CMOS-based photonic devices to enhance their performance and functionalities.",
author = "Chang, {Chun Chieh} and John Nogan and Yang, {Zu Po} and Kort-Kamp, {Wilton J.M.} and Willard Ross and Luk, {Ting S.} and Dalvit, {Diego A.R.} and Azad, {Abul K.} and Chen, {Hou Tong}",
note = "Funding Information: We acknowledge support from Los Alamos National Laboratory LDRD program. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Los Alamos National Laboratory, an affirmative action equal opportunity employer, is managed by Triad National Security, LLC for the U.S. Department of Energy{\textquoteright}s NNSA, under contract DE-AC52-06NA25396. The authors acknowledge Dr. Sergei Ivanov for his assistance in the XRD measurements and Prof. Ing-Song Yu for XPS analyses. C.C.C. acknowledges the financial support by the Subsidy for New Instructor{\textquoteright}s Research from National Taiwan Normal University. Z.P.Y. acknowledges Ministry of Science and Technology of Taiwan for the financial support under contract MOST 106-2221-E-009-122-MY3 and the support by the Higher Education Sprout Project of the National Chiao Tung University and Ministry of Education (MOE) of Taiwan. W.K.K. acknowledges Center for Nonlinear Studies for partial funding. Publisher Copyright: {\textcopyright} 2019, The Author(s).",
year = "2019",
month = dec,
day = "1",
doi = "10.1038/s41598-019-51236-3",
language = "English",
volume = "9",
journal = "Scientific reports",
issn = "2045-2322",
publisher = "Nature Publishing Group",
number = "1",
}