High sensitivity three-stage microfabricated preconcentrator-focuser for micro gas chromatography

W. C. Tian, H. K.L. Chan, S. W. Pang, C. J. Lu, E. T. Zellers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

The results of a high sensitivity three-stage microfabricated preconcentrator-focuser (μPCF) for a micro gas chromatograph (μGC) that can provide real-time monitoring for a quantification and identification analysis of complex organic vapor mixtures are presented. The device consists of a thick Si microheater loaded with graphitized carbon adsorbents and sealed with a Si micromachined cover plate. This three-stage device has effectively extended the detection range of the compounds to cover up to four orders of magnitude in volatility. In addition, the dead volume, thermal mass, heating efficiency, and pressure drop of the single-stage μPCF are improved significantly in the three-stage μPCF and thus increase the device performance substantially. We demonstrate that thirty common organic vapors are well separated and desorption peak widths are all within 2.05 s.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages131-134
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Design optimization
  • Energy consumption
  • Gas chromatography
  • Laboratories
  • Micromachining
  • Monitoring
  • Prototypes
  • Space heating
  • Volatile organic compounds
  • Wireless sensor networks

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Tian, W. C., Chan, H. K. L., Pang, S. W., Lu, C. J., & Zellers, E. T. (2003). High sensitivity three-stage microfabricated preconcentrator-focuser for micro gas chromatography. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 131-134). [1215270] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215270