High quality step-edge substrates for high- Tc superconducting devices

C. H. Wu; M. J. Chen; J. C. Chen; K. L. Chen; H. C. Yang; M. S. Hsu; T. S. Lai; Y. S. Tsai; H. E. Horng; J. H. Chen; J. T. Jeng

doi:10.1063/1.2179407

High quality step-edge substrates for high- Tc superconducting devices

C. H. Wu, M. J. Chen, J. C. Chen, K. L. Chen, H. C. Yang^*, M. S. Hsu, T. S. Lai, Y. S. Tsai, H. E. Horng, J. H. Chen, J. T. Jeng

^*Corresponding author for this work

Undergraduate Program of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

Despite the significant progress in fabrication methods of step edge, the lack of reproducibility still hinders their use in more complicated systems. To pursue the high reproducibility and quality of step edge for high- Tc superconducting devices, we have developed the technique to fabricate high quality step-edge substrates with arbitrary step angles. We used two steps to improve the step ramp quality substantially. The surface microscopy of step substrates shows high uniformity with respect to any step angle. There are no needles, waves, trenches, cascades, or other flaws on these surfaces. Serial Josephson junctions and superconducting quantum interference device arrays were fabricated onto step-edge substrates. The step-edge devices exhibit excellent results.

Original language	English
Article number	033901
Journal	Review of Scientific Instruments
Volume	77
Issue number	3
DOIs	https://doi.org/10.1063/1.2179407
Publication status	Published - 2006 Mar

ASJC Scopus subject areas

Instrumentation

Access to Document

10.1063/1.2179407

Cite this

@article{536215c7bb3e4b07b15471d8a89bffb6,

title = "High quality step-edge substrates for high- Tc superconducting devices",

abstract = "Despite the significant progress in fabrication methods of step edge, the lack of reproducibility still hinders their use in more complicated systems. To pursue the high reproducibility and quality of step edge for high- Tc superconducting devices, we have developed the technique to fabricate high quality step-edge substrates with arbitrary step angles. We used two steps to improve the step ramp quality substantially. The surface microscopy of step substrates shows high uniformity with respect to any step angle. There are no needles, waves, trenches, cascades, or other flaws on these surfaces. Serial Josephson junctions and superconducting quantum interference device arrays were fabricated onto step-edge substrates. The step-edge devices exhibit excellent results.",

author = "Wu, {C. H.} and Chen, {M. J.} and Chen, {J. C.} and Chen, {K. L.} and Yang, {H. C.} and Hsu, {M. S.} and Lai, {T. S.} and Tsai, {Y. S.} and Horng, {H. E.} and Chen, {J. H.} and Jeng, {J. T.}",

year = "2006",

month = mar,

doi = "10.1063/1.2179407",

language = "English",

volume = "77",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "3",

}

TY - JOUR

T1 - High quality step-edge substrates for high- Tc superconducting devices

AU - Wu, C. H.

AU - Chen, M. J.

AU - Chen, J. C.

AU - Chen, K. L.

AU - Yang, H. C.

AU - Hsu, M. S.

AU - Lai, T. S.

AU - Tsai, Y. S.

AU - Horng, H. E.

AU - Chen, J. H.

AU - Jeng, J. T.

PY - 2006/3

Y1 - 2006/3

N2 - Despite the significant progress in fabrication methods of step edge, the lack of reproducibility still hinders their use in more complicated systems. To pursue the high reproducibility and quality of step edge for high- Tc superconducting devices, we have developed the technique to fabricate high quality step-edge substrates with arbitrary step angles. We used two steps to improve the step ramp quality substantially. The surface microscopy of step substrates shows high uniformity with respect to any step angle. There are no needles, waves, trenches, cascades, or other flaws on these surfaces. Serial Josephson junctions and superconducting quantum interference device arrays were fabricated onto step-edge substrates. The step-edge devices exhibit excellent results.

AB - Despite the significant progress in fabrication methods of step edge, the lack of reproducibility still hinders their use in more complicated systems. To pursue the high reproducibility and quality of step edge for high- Tc superconducting devices, we have developed the technique to fabricate high quality step-edge substrates with arbitrary step angles. We used two steps to improve the step ramp quality substantially. The surface microscopy of step substrates shows high uniformity with respect to any step angle. There are no needles, waves, trenches, cascades, or other flaws on these surfaces. Serial Josephson junctions and superconducting quantum interference device arrays were fabricated onto step-edge substrates. The step-edge devices exhibit excellent results.

UR - http://www.scopus.com/inward/record.url?scp=33645894173&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645894173&partnerID=8YFLogxK

U2 - 10.1063/1.2179407

DO - 10.1063/1.2179407

M3 - Article

AN - SCOPUS:33645894173

SN - 0034-6748

VL - 77

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 3

M1 - 033901

ER -

High quality step-edge substrates for high- Tc superconducting devices

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this