Skip to main navigation Skip to search Skip to main content

High-performance poly-Si TFTs using ultrathin HfSiOx gate dielectric for monolithic three-dimensional integrated circuits and system on glass applications

  • M. H. Lee
  • , S. L. Wu
  • , M. J. Yang
  • , K. J. Chen
  • , G. L. Luo
  • , L. S. Lee
  • , M. J. Kao

Research output: Contribution to journal › Article › peer-review

7   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-performance poly-Si TFTs using ultrathin HfSiOx gate dielectric for monolithic three-dimensional integrated circuits and system on glass applications'. Together they form a unique fingerprint.
Sort by

INIS

Material Science