High-performance metal-insulator-metal capacitors with HfTiO/Y 2O3 stacked dielectric

Bing Yue Tsui*, Hsiao Hsuan Hsu, Chun Hu Cheng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-performance metal-insulator-metal capacitors with HfTiO/Y 2O3 stacked dielectric'. Together they form a unique fingerprint.

INIS

Physics

Material Science