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Dive into the research topics of 'High dielectric constant terbium oxide (Tb <sub>2</sub>O <sub>3</sub>) dielectric deposited on strained-Si:C'. Together they form a unique fingerprint.
Chemical Compounds
Terbium
Rapid thermal annealing
Gate dielectrics
MOS devices
Atomic force microscopy
X ray photoelectron spectroscopy
Oxides
Permittivity
X ray diffraction
Defects
Temperature
Engineering & Materials Science
Terbium
Rapid thermal annealing
Gate dielectrics
MOS devices
Atomic force microscopy
X ray photoelectron spectroscopy
Permittivity
X ray diffraction
Oxides
Defects
Temperature
Physics & Astronomy
terbium
permittivity
oxides
metal oxide semiconductors
semiconductor devices
electrical measurement
x rays
photoelectron spectroscopy
atomic force microscopy
annealing
defects
diffraction
temperature