High dielectric constant terbium oxide (Tb 2O 3) dielectric deposited on strained-Si:C

Chyuan Haur Kao, Kou Chen Liu, Min-Hung Lee, Shih Nan Cheng, Ching Hua Huang, Wen Kai Lin

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

High-k Tb 2O 3 films deposited on strained-Si:C and treated with different post-rapid thermal annealing temperatures were formed as alternative gate dielectrics in metal oxide semiconductor devices. The dielectrics were investigated by X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, and electrical measurements. It was found that Tb 2O 3 dielectrics properly annealed at 800°C form well-crystallized Tb 2O 3 structures with few defects.

Original languageEnglish
Pages (from-to)3402-3405
Number of pages4
JournalThin Solid Films
Volume520
Issue number8
DOIs
Publication statusPublished - 2012 Feb 1

Fingerprint

Terbium
terbium
Oxides
Permittivity
permittivity
MOS devices
oxides
Rapid thermal annealing
Gate dielectrics
Atomic force microscopy
X ray photoelectron spectroscopy
semiconductor devices
metal oxide semiconductors
X ray diffraction
Defects
electrical measurement
x rays
photoelectron spectroscopy
atomic force microscopy
annealing

Keywords

  • Rapid thermal annealing
  • Strained-Si:C
  • Terbium oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

High dielectric constant terbium oxide (Tb 2O 3) dielectric deposited on strained-Si:C. / Kao, Chyuan Haur; Liu, Kou Chen; Lee, Min-Hung; Cheng, Shih Nan; Huang, Ching Hua; Lin, Wen Kai.

In: Thin Solid Films, Vol. 520, No. 8, 01.02.2012, p. 3402-3405.

Research output: Contribution to journalArticle

Kao, Chyuan Haur ; Liu, Kou Chen ; Lee, Min-Hung ; Cheng, Shih Nan ; Huang, Ching Hua ; Lin, Wen Kai. / High dielectric constant terbium oxide (Tb 2O 3) dielectric deposited on strained-Si:C. In: Thin Solid Films. 2012 ; Vol. 520, No. 8. pp. 3402-3405.
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AU - Huang, Ching Hua

AU - Lin, Wen Kai

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