Heteroepitaxial growth of sixfold symmetric osmium on Si (111) and Si (100)

Tai Yen Peng, C. K. Lo, Y. D. Yao, San Yuan Chen

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Abstract

Growing sixfold symmetric osmium (Os) epitaxial films with suitable buffer layers was developed. Using a Cu buffer layer, the lattice mismatch between Os (0002) and Si (100) was significantly reduced from >30% to ∼7% to grow Os films with twin relationships and weak sixfold symmetries. On the other hand, the CuAu buffer layer was selected to form a fcc (111) surface mesh on H-Si (111)- 1×1, and therefore sixfold symmetric Os films were grown due to the lower lattice mismatch. Such growth properties may be applied in the high density magnetic random access memory manufacturing processes to connect the magnetic tunnel junction growth and Cu metal line directly.

Original languageEnglish
Article number121904
JournalApplied Physics Letters
Volume90
Issue number12
DOIs
Publication statusPublished - 2007 Mar 30

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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