@inproceedings{321067a877444d1e981df3eca231d980,
title = "Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method",
abstract = "In this study, we would show the details of a new fabricating process for the grown of the ZnO nano-wire arrays. The anodic aluminum oxide (AAO) was used as template and atomic-layer deposition (ALD) method was used to deposit ZnO thin films on AAO template. Because the ALD method can deposit the thin films with high aspect ratio, for that the ZnO particles are hoped to fill into the AAO tubes to form the ZnO nano-wires. The ZnO residual on the surfaces of AAO template was etched by using HCl solution (0.2328M or 0.1164M). The AAO template was removed by using NaOH solution (0.5M, 0.1M), then the ZnO nano-wire arrays were obtained.",
keywords = "AAO, Atomic-Layer Deposition, ZnO Nano-Wire Array",
author = "Hsu, {Wei Fan} and Kuo, {Chin Guo} and Chao, {Yi Chieh} and Lee, {Jeen Fong} and Yang, {Cheng Fu} and Juang, {Feng Renn}",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 2016 International Conference on Applied System Innovation, IEEE ICASI 2016 ; Conference date: 28-05-2016 Through 01-06-2016",
year = "2016",
month = aug,
day = "10",
doi = "10.1109/ICASI.2016.7539895",
language = "English",
series = "2016 International Conference on Applied System Innovation, IEEE ICASI 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 International Conference on Applied System Innovation, IEEE ICASI 2016",
}