Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method

Wei Fan Hsu, Chin Guo Kuo, Yi Chieh Chao, Jeen Fong Lee, Cheng Fu Yang, Feng Renn Juang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we would show the details of a new fabricating process for the grown of the ZnO nano-wire arrays. The anodic aluminum oxide (AAO) was used as template and atomic-layer deposition (ALD) method was used to deposit ZnO thin films on AAO template. Because the ALD method can deposit the thin films with high aspect ratio, for that the ZnO particles are hoped to fill into the AAO tubes to form the ZnO nano-wires. The ZnO residual on the surfaces of AAO template was etched by using HCl solution (0.2328M or 0.1164M). The AAO template was removed by using NaOH solution (0.5M, 0.1M), then the ZnO nano-wire arrays were obtained.

Original languageEnglish
Title of host publication2016 International Conference on Applied System Innovation, IEEE ICASI 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781467398886
DOIs
Publication statusPublished - 2016 Aug 10
Event2016 International Conference on Applied System Innovation, IEEE ICASI 2016 - Ginowan City Okinawa, Japan
Duration: 2016 May 282016 Jun 1

Other

Other2016 International Conference on Applied System Innovation, IEEE ICASI 2016
CountryJapan
CityGinowan City Okinawa
Period16/5/2816/6/1

Fingerprint

Atomic layer deposition
Nanowires
Aluminum
Oxides
Template
Wire
Deposits
Thin Films
Thin films
Aspect ratio
Aspect Ratio
Zinc Oxide
Tube

Keywords

  • AAO
  • Atomic-Layer Deposition
  • ZnO Nano-Wire Array

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Control and Systems Engineering
  • Social Sciences (miscellaneous)
  • Business, Management and Accounting (miscellaneous)
  • Electrical and Electronic Engineering
  • Control and Optimization

Cite this

Hsu, W. F., Kuo, C. G., Chao, Y. C., Lee, J. F., Yang, C. F., & Juang, F. R. (2016). Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. In 2016 International Conference on Applied System Innovation, IEEE ICASI 2016 [7539895] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICASI.2016.7539895

Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. / Hsu, Wei Fan; Kuo, Chin Guo; Chao, Yi Chieh; Lee, Jeen Fong; Yang, Cheng Fu; Juang, Feng Renn.

2016 International Conference on Applied System Innovation, IEEE ICASI 2016. Institute of Electrical and Electronics Engineers Inc., 2016. 7539895.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hsu, WF, Kuo, CG, Chao, YC, Lee, JF, Yang, CF & Juang, FR 2016, Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. in 2016 International Conference on Applied System Innovation, IEEE ICASI 2016., 7539895, Institute of Electrical and Electronics Engineers Inc., 2016 International Conference on Applied System Innovation, IEEE ICASI 2016, Ginowan City Okinawa, Japan, 16/5/28. https://doi.org/10.1109/ICASI.2016.7539895
Hsu WF, Kuo CG, Chao YC, Lee JF, Yang CF, Juang FR. Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. In 2016 International Conference on Applied System Innovation, IEEE ICASI 2016. Institute of Electrical and Electronics Engineers Inc. 2016. 7539895 https://doi.org/10.1109/ICASI.2016.7539895
Hsu, Wei Fan ; Kuo, Chin Guo ; Chao, Yi Chieh ; Lee, Jeen Fong ; Yang, Cheng Fu ; Juang, Feng Renn. / Growth of ZnO nano-wire arrays using AAO template and atomic-layer deposition method. 2016 International Conference on Applied System Innovation, IEEE ICASI 2016. Institute of Electrical and Electronics Engineers Inc., 2016.
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