Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang; Y. L. Ding; M. H. Chou; H. E. Horng

doi:10.1016/0921-4534(91)91115-K

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang
, Y. L. Ding
, M. H. Chou
, H. E. Horng

Undergraduate Program of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-T_c YBa₂Cu₃O_7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

Original language	English
Pages (from-to)	1981-1982
Number of pages	2
Journal	Physica C: Superconductivity and its Applications
Volume	185-189
Issue number	PART 3
DOIs	https://doi.org/10.1016/0921-4534(91)91115-K
Publication status	Published - 1991 Dec 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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10.1016/0921-4534(91)91115-K

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@article{fd034159bef746cebd27368eff363f66,

title = "Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique",

abstract = "We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.",

author = "Yang, \{H. C.\} and Ding, \{Y. L.\} and Chou, \{M. H.\} and Horng, \{H. E.\}",

note = "Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.",

year = "1991",

month = dec,

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doi = "10.1016/0921-4534(91)91115-K",

language = "English",

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TY - JOUR

T1 - Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

AU - Yang, H. C.

AU - Ding, Y. L.

AU - Chou, M. H.

AU - Horng, H. E.

N1 - Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

AB - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

UR - https://www.scopus.com/pages/publications/0026377521

UR - https://www.scopus.com/pages/publications/0026377521#tab=citedBy

U2 - 10.1016/0921-4534(91)91115-K

DO - 10.1016/0921-4534(91)91115-K

M3 - Article

AN - SCOPUS:0026377521

SN - 0921-4534

VL - 185-189

SP - 1981

EP - 1982

JO - Physica C: Superconductivity and its Applications

JF - Physica C: Superconductivity and its Applications

IS - PART 3

ER -

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

Abstract

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