Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang; Y. L. Ding; M. H. Chou; H. E. Horng

doi:10.1016/0921-4534(91)91115-K

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang, Y. L. Ding, M. H. Chou, H. E. Horng

Undergraduate Program of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-T_c YBa₂Cu₃O_7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

Original language	English
Pages (from-to)	1981-1982
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	185-189
Issue number	PART 3
DOIs	https://doi.org/10.1016/0921-4534(91)91115-K
Publication status	Published - 1991 Dec 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

Access to Document

10.1016/0921-4534(91)91115-K

Cite this

@article{fd034159bef746cebd27368eff363f66,

title = "Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique",

abstract = "We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.",

author = "Yang, {H. C.} and Ding, {Y. L.} and Chou, {M. H.} and Horng, {H. E.}",

note = "Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.",

year = "1991",

month = dec,

day = "1",

doi = "10.1016/0921-4534(91)91115-K",

language = "English",

volume = "185-189",

pages = "1981--1982",

journal = "Physica C: Superconductivity and its applications",

issn = "0921-4534",

publisher = "Elsevier",

number = "PART 3",

}

TY - JOUR

T1 - Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

AU - Yang, H. C.

AU - Ding, Y. L.

AU - Chou, M. H.

AU - Horng, H. E.

N1 - Funding Information: This work was supported by the Na tional Science Council of R.O.C. under contract No. NSC79-0208-M002-38.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

AB - We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

UR - http://www.scopus.com/inward/record.url?scp=0026377521&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026377521&partnerID=8YFLogxK

U2 - 10.1016/0921-4534(91)91115-K

DO - 10.1016/0921-4534(91)91115-K

M3 - Article

AN - SCOPUS:0026377521

SN - 0921-4534

VL - 185-189

SP - 1981

EP - 1982

JO - Physica C: Superconductivity and its applications

JF - Physica C: Superconductivity and its applications

IS - PART 3

ER -

Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this