Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang, Y. L. Ding, M. H. Chou, H. E. Horng

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Abstract

We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

Original languageEnglish
Pages (from-to)1981-1982
Number of pages2
JournalPhysica C: Superconductivity and its applications
Volume185-189
Issue numberPART 3
DOIs
Publication statusPublished - 1991 Dec 1

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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