Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

H. C. Yang, Y. L. Ding, M. H. Chou, H. E. Horng

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

    Original languageEnglish
    Pages (from-to)1981-1982
    Number of pages2
    JournalPhysica C: Superconductivity and its applications
    Volume185-189
    Issue numberPART 3
    DOIs
    Publication statusPublished - 1991 Dec 1

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Energy Engineering and Power Technology
    • Electrical and Electronic Engineering

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