Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

Hong-Chang Yang, Y. L. Ding, M. H. Chou, Herng-Er Horng

    Research output: Contribution to journalArticle

    1 Citation (Scopus)

    Abstract

    We have in-situ grown superconducting ultrathin YBaCuO films by an off-axis rf sputtering technique using a single high-Tc YBa2Cu3O7-y oxide compound. The substrates was MgO(100). The thickness of the films varies from 20 to 200 nm. The X-ray diffraction pattern shows clear diffraction peaks. The scanning electron micrograph shows a smooth surface morphology. Superconductivities of ultrathin films will be reported.

    Original languageEnglish
    Pages (from-to)1981-1982
    Number of pages2
    JournalPhysica C: Superconductivity and its applications
    Volume185-189
    Issue numberPART 3
    DOIs
    Publication statusPublished - 1991 Dec 1

    Fingerprint

    Ultrathin films
    Sputtering
    sputtering
    Superconducting films
    Superconductivity
    Oxides
    Diffraction patterns
    Surface morphology
    Diffraction
    Scanning
    X ray diffraction
    Electrons
    Substrates
    diffraction patterns
    superconductivity
    scanning
    oxides
    diffraction
    electrons
    x rays

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Energy Engineering and Power Technology
    • Electrical and Electronic Engineering

    Cite this

    Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique. / Yang, Hong-Chang; Ding, Y. L.; Chou, M. H.; Horng, Herng-Er.

    In: Physica C: Superconductivity and its applications, Vol. 185-189, No. PART 3, 01.12.1991, p. 1981-1982.

    Research output: Contribution to journalArticle

    Yang, Hong-Chang ; Ding, Y. L. ; Chou, M. H. ; Horng, Herng-Er. / Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique. In: Physica C: Superconductivity and its applications. 1991 ; Vol. 185-189, No. PART 3. pp. 1981-1982.
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