Green fluorescence of Mn-doped Zn2SiO4 thin film enhanced by surface plasmon of nano-silver coating

Kun Cheng Peng, Yi Chung Lin, Shiu Jen Liu, Keng Lin Hsieh, Chiun An Tseng, Jing Chie Lin

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2 Citations (Scopus)


One thin film of Mn-doped ZnO was deposited on a quartz glass in a sputtering system where RF magnetron and DC were employed as power sources. The specimen was removed and annealed in an atmospheric furnace at 1200 °C for 2 h. This annealed specimen was identified as Mndoped Zn2SiO 4 (MZS) crystal. The sample was sputtered to coat it with one Ag film varying in thickness (i.e., 3, 5, and 10 nm), and subjected to rapid thermal annealing (RTA) at 500 °C for 15 min. The post-RTA-treated specimens were denoted as 3 Ag(MZS)R, 5 Ag(MZS)R, and 10 Ag(MZS)R, and their surfaces revealed a homogenous distribution of silver nanoparticles. Photoluminescence (PL) measurement showed a fluorescence of 530nm (green light) emitted from MZS. A coating of Ag particles on MZS tended to increase the PL intensity in the following order: 10 Ag(MZS)R (29%) < 5 Ag(MZS)R (72%) < 3 Ag(MZS)R (100%).

Original languageEnglish
Article number01AC02
JournalJapanese Journal of Applied Physics
Issue number1 PART2
Publication statusPublished - 2013 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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