Geometric variation: A novel approach to examine the surface roughness and the line roughness effects in trigate FinFETs

Engineering

• Oxide Thickness 100%
• Roughness Effect 100%
• Electric Power Utilization 50%
• Experimental Result 50%
• Gate Oxide 50%
• Gate Capacitance 50%
• Induced Roughness 50%
• Fin Width 50%
• Active Power 50%
• Fin Height 50%
• Aspect Ratio 50%

INIS

• variations 100%
• surfaces 100%
• geometry 100%
• roughness 100%
• fins 30%
• oxides 30%
• power 20%
• thickness 20%
• design 10%
• ions 10%
• devices 10%
• yields 10%
• manufacturing 10%
• width 10%
• capacitance 10%
• leakage 10%
• aspect ratio 10%
• guidelines 10%
• scale height 10%