Flexible graphene-based micro-capacitors using ultrafast laser ablation

Chien Ping Wang, Ching Pong Chou, Po Chun Wang, Tien Li Chang

Research output: Contribution to journalArticle

Abstract

This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle θ ≤ 30° after 1000 times bending test. The decreasing rates of capacitance retention substantially increased with bending angles from 30° to 180°. Touched capacitances increased sharply as pressure rose from 0 to 6 kPa. These experimental results can be considered in designs of durable and high sensitivity flexible graphene-based touch sensors.

Original languageEnglish
Article number111000
JournalMicroelectronic Engineering
Volume215
DOIs
Publication statusPublished - 2019 Jul 15

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Keywords

  • Flexible
  • Graphene
  • Picosecond laser
  • Sensor
  • Ultrafast laser ablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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