Flexible graphene-based micro-capacitors using ultrafast laser ablation

Chien Ping Wang, Ching Pong Chou, Po Chun Wang, Tien-Li Chang

Research output: Contribution to journalArticle

Abstract

This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle θ ≤ 30° after 1000 times bending test. The decreasing rates of capacitance retention substantially increased with bending angles from 30° to 180°. Touched capacitances increased sharply as pressure rose from 0 to 6 kPa. These experimental results can be considered in designs of durable and high sensitivity flexible graphene-based touch sensors.

Original languageEnglish
Article number111000
JournalMicroelectronic Engineering
Volume215
DOIs
Publication statusPublished - 2019 Jul 15

Fingerprint

Ultrafast lasers
Graphite
Laser ablation
Graphene
laser ablation
capacitors
graphene
Capacitors
Capacitance
capacitance
Electrodes
electrodes
Polyethylene Terephthalates
touch
sensors
picosecond pulses
polyethylene terephthalate
Sensors
Bending tests
durability

Keywords

  • Flexible
  • Graphene
  • Picosecond laser
  • Sensor
  • Ultrafast laser ablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Flexible graphene-based micro-capacitors using ultrafast laser ablation. / Wang, Chien Ping; Chou, Ching Pong; Wang, Po Chun; Chang, Tien-Li.

In: Microelectronic Engineering, Vol. 215, 111000, 15.07.2019.

Research output: Contribution to journalArticle

Wang, Chien Ping ; Chou, Ching Pong ; Wang, Po Chun ; Chang, Tien-Li. / Flexible graphene-based micro-capacitors using ultrafast laser ablation. In: Microelectronic Engineering. 2019 ; Vol. 215.
@article{58f1557d72dd49a0a90571e835722aae,
title = "Flexible graphene-based micro-capacitors using ultrafast laser ablation",
abstract = "This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle θ ≤ 30° after 1000 times bending test. The decreasing rates of capacitance retention substantially increased with bending angles from 30° to 180°. Touched capacitances increased sharply as pressure rose from 0 to 6 kPa. These experimental results can be considered in designs of durable and high sensitivity flexible graphene-based touch sensors.",
keywords = "Flexible, Graphene, Picosecond laser, Sensor, Ultrafast laser ablation",
author = "Wang, {Chien Ping} and Chou, {Ching Pong} and Wang, {Po Chun} and Tien-Li Chang",
year = "2019",
month = "7",
day = "15",
doi = "10.1016/j.mee.2019.111000",
language = "English",
volume = "215",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

TY - JOUR

T1 - Flexible graphene-based micro-capacitors using ultrafast laser ablation

AU - Wang, Chien Ping

AU - Chou, Ching Pong

AU - Wang, Po Chun

AU - Chang, Tien-Li

PY - 2019/7/15

Y1 - 2019/7/15

N2 - This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle θ ≤ 30° after 1000 times bending test. The decreasing rates of capacitance retention substantially increased with bending angles from 30° to 180°. Touched capacitances increased sharply as pressure rose from 0 to 6 kPa. These experimental results can be considered in designs of durable and high sensitivity flexible graphene-based touch sensors.

AB - This study investigated the sensor performance and durability of flexible graphene-based micro-capacitor using ultrafast laser ablation with picosecond (PS) pulses. Micro-patterns were fabricated under varying electrode widths, lengths, and gaps on the flexible polyethylene terephthalate (PET) substrates for optimal capacitive performance. The experimental results showed that the untouched capacitance of the micro-capacitors had an approximately linear relationship with electrode widths and lengths. Increasing the electrode width can effectively enhance capacitance of the micro-capacitor, especially under small electrode gap. Micro-capacitors exhibited stable relative resistance change and excellent capacitance retention when bending angle θ ≤ 30° after 1000 times bending test. The decreasing rates of capacitance retention substantially increased with bending angles from 30° to 180°. Touched capacitances increased sharply as pressure rose from 0 to 6 kPa. These experimental results can be considered in designs of durable and high sensitivity flexible graphene-based touch sensors.

KW - Flexible

KW - Graphene

KW - Picosecond laser

KW - Sensor

KW - Ultrafast laser ablation

UR - http://www.scopus.com/inward/record.url?scp=85066100288&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85066100288&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2019.111000

DO - 10.1016/j.mee.2019.111000

M3 - Article

AN - SCOPUS:85066100288

VL - 215

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

M1 - 111000

ER -