First-generation hybrid MEMS gas chromatograph

Chia Jung Lu; William H. Steinecker; Wei Cheng Tian; Michael C. Oborny; Jamie M. Nichols; Masoud Agah; Joseph A. Potkay; Helena K.L. Chan; Jeffrey Driscoll; Richard D. Sacks; Kensall D. Wise; Stella W. Pang; Edward T. Zellers

doi:10.1039/b508596a

First-generation hybrid MEMS gas chromatograph

Chia Jung Lu, William H. Steinecker, Wei Cheng Tian, Michael C. Oborny, Jamie M. Nichols, Masoud Agah, Joseph A. Potkay, Helena K.L. Chan, Jeffrey Driscoll, Richard D. Sacks, Kensall D. Wise, Stella W. Pang, Edward T. Zellers^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

216 Citations (Scopus)

Abstract

The fabrication, assembly, and initial testing of a hybrid microfabricated gas Chromatograph (μGC) is described. The μGC incorporates capabilities for on-board calibration, sample preconcentration and focused thermal desorption, temperature-programmed separations, and "spectral" detection with an integrated array of microsensors, and is designed for rapid determinations of complex mixtures of environmental contaminants at trace concentrations. Ambient air is used as the carrier gas to avoid the need for on-board gas supplies. The microsystem is plumbed through an etched-Si/glass microfluidic interconnection substrate with fused silica capillaries and employs a miniature commercial pump and valve subsystem for directing sample flow. The latest performance data on each system component are presented followed by first analytical results from the working microsystem. Tradeoffs in system performance as a function of volumetric flow rate are explored. The determination of an 11-vapor mixture of typical indoor air contaminants in less than 90 s is demonstrated with projected detection limits in the low part-per-billion concentration range for a preconcentrated air-sample volume of 0.25 L.

Original language	English
Pages (from-to)	1123-1131
Number of pages	9
Journal	Lab on a Chip
Volume	5
Issue number	10
DOIs	https://doi.org/10.1039/b508596a
Publication status	Published - 2005 Oct
Externally published	Yes

ASJC Scopus subject areas

Bioengineering
Biochemistry
General Chemistry
Biomedical Engineering

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@article{ccb5851504ee47fabec23cb7492e06bb,

title = "First-generation hybrid MEMS gas chromatograph",

abstract = "The fabrication, assembly, and initial testing of a hybrid microfabricated gas Chromatograph (μGC) is described. The μGC incorporates capabilities for on-board calibration, sample preconcentration and focused thermal desorption, temperature-programmed separations, and {"}spectral{"} detection with an integrated array of microsensors, and is designed for rapid determinations of complex mixtures of environmental contaminants at trace concentrations. Ambient air is used as the carrier gas to avoid the need for on-board gas supplies. The microsystem is plumbed through an etched-Si/glass microfluidic interconnection substrate with fused silica capillaries and employs a miniature commercial pump and valve subsystem for directing sample flow. The latest performance data on each system component are presented followed by first analytical results from the working microsystem. Tradeoffs in system performance as a function of volumetric flow rate are explored. The determination of an 11-vapor mixture of typical indoor air contaminants in less than 90 s is demonstrated with projected detection limits in the low part-per-billion concentration range for a preconcentrated air-sample volume of 0.25 L.",

author = "Lu, {Chia Jung} and Steinecker, {William H.} and Tian, {Wei Cheng} and Oborny, {Michael C.} and Nichols, {Jamie M.} and Masoud Agah and Potkay, {Joseph A.} and Chan, {Helena K.L.} and Jeffrey Driscoll and Sacks, {Richard D.} and Wise, {Kensall D.} and Pang, {Stella W.} and Zellers, {Edward T.}",

year = "2005",

month = oct,

doi = "10.1039/b508596a",

language = "English",

volume = "5",

pages = "1123--1131",

journal = "Lab on a Chip",

issn = "1473-0197",

publisher = "Royal Society of Chemistry",

number = "10",

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AU - Lu, Chia Jung

AU - Steinecker, William H.

AU - Tian, Wei Cheng

AU - Oborny, Michael C.

AU - Nichols, Jamie M.

AU - Agah, Masoud

AU - Potkay, Joseph A.

AU - Chan, Helena K.L.

AU - Driscoll, Jeffrey

AU - Sacks, Richard D.

AU - Wise, Kensall D.

AU - Pang, Stella W.

AU - Zellers, Edward T.

PY - 2005/10

Y1 - 2005/10

N2 - The fabrication, assembly, and initial testing of a hybrid microfabricated gas Chromatograph (μGC) is described. The μGC incorporates capabilities for on-board calibration, sample preconcentration and focused thermal desorption, temperature-programmed separations, and "spectral" detection with an integrated array of microsensors, and is designed for rapid determinations of complex mixtures of environmental contaminants at trace concentrations. Ambient air is used as the carrier gas to avoid the need for on-board gas supplies. The microsystem is plumbed through an etched-Si/glass microfluidic interconnection substrate with fused silica capillaries and employs a miniature commercial pump and valve subsystem for directing sample flow. The latest performance data on each system component are presented followed by first analytical results from the working microsystem. Tradeoffs in system performance as a function of volumetric flow rate are explored. The determination of an 11-vapor mixture of typical indoor air contaminants in less than 90 s is demonstrated with projected detection limits in the low part-per-billion concentration range for a preconcentrated air-sample volume of 0.25 L.

AB - The fabrication, assembly, and initial testing of a hybrid microfabricated gas Chromatograph (μGC) is described. The μGC incorporates capabilities for on-board calibration, sample preconcentration and focused thermal desorption, temperature-programmed separations, and "spectral" detection with an integrated array of microsensors, and is designed for rapid determinations of complex mixtures of environmental contaminants at trace concentrations. Ambient air is used as the carrier gas to avoid the need for on-board gas supplies. The microsystem is plumbed through an etched-Si/glass microfluidic interconnection substrate with fused silica capillaries and employs a miniature commercial pump and valve subsystem for directing sample flow. The latest performance data on each system component are presented followed by first analytical results from the working microsystem. Tradeoffs in system performance as a function of volumetric flow rate are explored. The determination of an 11-vapor mixture of typical indoor air contaminants in less than 90 s is demonstrated with projected detection limits in the low part-per-billion concentration range for a preconcentrated air-sample volume of 0.25 L.

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First-generation hybrid MEMS gas chromatograph

Abstract

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