Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Rih Sheng Jian, Tse Yu Wang, Lung Yu Song, Chun Yen Kuo, Wei Cheng Tian, Ei Wen Lo, Chia Jung Lu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

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Chemical Engineering

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