Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Rih Sheng Jian; Tse Yu Wang; Lung Yu Song; Chun Yen Kuo; Wei Cheng Tian; Ei Wen Lo; Chia Jung Lu

doi:10.1016/j.buildenv.2015.08.023

Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Rih Sheng Jian, Tse Yu Wang, Lung Yu Song, Chun Yen Kuo, Wei Cheng Tian, Ei Wen Lo, Chia Jung Lu^*

^*Corresponding author for this work

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Volatile organic compounds (VOCs) inside a semiconductor cleanroom and the concentration changes with indoor process activities are investigated. The species of volatile organic compounds (VOCs) were identified using canister/GC-MS analyses. The persistent existing VOCs inside the cleanroom of a field study included acetone, isopropanol, n-hexane, toluene, m-xylene, and anisole. A micro gas chromatograph (μGC) equipped with a high-ratio mini-preconcentrator and a photo-ionization detector was tuned for the onsite analysis for these target VOCs. As the use of isopropyl alcohol and acetone occurred at different times, the concentrations of these two chemicals surged to hundreds of ppb and were recorded by the μGC in a real-time manner. In addition, the time-dependent concentration of n-hexane was found to be highly correlated to isopropanol. The rapid establishment of a large amount of data for individual VOCs enabled the observation of activity related changes for these chemicals inside a cleanroom.

Original language	English
Pages (from-to)	287-295
Number of pages	9
Journal	Building and Environment
Volume	94
Issue number	P1
DOIs	https://doi.org/10.1016/j.buildenv.2015.08.023
Publication status	Published - 2015 Dec 1

Keywords

Environmental monitoring
Indoor air quality
Micro GC
Semiconductor cleanroom
VOCs

ASJC Scopus subject areas

Environmental Engineering
Civil and Structural Engineering
Geography, Planning and Development
Building and Construction

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10.1016/j.buildenv.2015.08.023

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title = "Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom",

abstract = "Volatile organic compounds (VOCs) inside a semiconductor cleanroom and the concentration changes with indoor process activities are investigated. The species of volatile organic compounds (VOCs) were identified using canister/GC-MS analyses. The persistent existing VOCs inside the cleanroom of a field study included acetone, isopropanol, n-hexane, toluene, m-xylene, and anisole. A micro gas chromatograph (μGC) equipped with a high-ratio mini-preconcentrator and a photo-ionization detector was tuned for the onsite analysis for these target VOCs. As the use of isopropyl alcohol and acetone occurred at different times, the concentrations of these two chemicals surged to hundreds of ppb and were recorded by the μGC in a real-time manner. In addition, the time-dependent concentration of n-hexane was found to be highly correlated to isopropanol. The rapid establishment of a large amount of data for individual VOCs enabled the observation of activity related changes for these chemicals inside a cleanroom.",

keywords = "Environmental monitoring, Indoor air quality, Micro GC, Semiconductor cleanroom, VOCs",

author = "Jian, {Rih Sheng} and Wang, {Tse Yu} and Song, {Lung Yu} and Kuo, {Chun Yen} and Tian, {Wei Cheng} and Lo, {Ei Wen} and Lu, {Chia Jung}",

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doi = "10.1016/j.buildenv.2015.08.023",

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AU - Jian, Rih Sheng

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AU - Tian, Wei Cheng

AU - Lo, Ei Wen

AU - Lu, Chia Jung

PY - 2015/12/1

Y1 - 2015/12/1

N2 - Volatile organic compounds (VOCs) inside a semiconductor cleanroom and the concentration changes with indoor process activities are investigated. The species of volatile organic compounds (VOCs) were identified using canister/GC-MS analyses. The persistent existing VOCs inside the cleanroom of a field study included acetone, isopropanol, n-hexane, toluene, m-xylene, and anisole. A micro gas chromatograph (μGC) equipped with a high-ratio mini-preconcentrator and a photo-ionization detector was tuned for the onsite analysis for these target VOCs. As the use of isopropyl alcohol and acetone occurred at different times, the concentrations of these two chemicals surged to hundreds of ppb and were recorded by the μGC in a real-time manner. In addition, the time-dependent concentration of n-hexane was found to be highly correlated to isopropanol. The rapid establishment of a large amount of data for individual VOCs enabled the observation of activity related changes for these chemicals inside a cleanroom.

AB - Volatile organic compounds (VOCs) inside a semiconductor cleanroom and the concentration changes with indoor process activities are investigated. The species of volatile organic compounds (VOCs) were identified using canister/GC-MS analyses. The persistent existing VOCs inside the cleanroom of a field study included acetone, isopropanol, n-hexane, toluene, m-xylene, and anisole. A micro gas chromatograph (μGC) equipped with a high-ratio mini-preconcentrator and a photo-ionization detector was tuned for the onsite analysis for these target VOCs. As the use of isopropyl alcohol and acetone occurred at different times, the concentrations of these two chemicals surged to hundreds of ppb and were recorded by the μGC in a real-time manner. In addition, the time-dependent concentration of n-hexane was found to be highly correlated to isopropanol. The rapid establishment of a large amount of data for individual VOCs enabled the observation of activity related changes for these chemicals inside a cleanroom.

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Field investigations and dynamic measurements of process activity induced VOCs inside a semiconductor cleanroom

Abstract

Keywords

ASJC Scopus subject areas

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